Excimer Laser Technology. 1st ed. 2005

種類:

電子ブック

責任表示:

edited by Dirk Basting, Gerd Marowsky

出版情報:

Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2005

著者名:

• Basting, Dirk.
• Marowsky, Gerd.
• SpringerLink (Online service)

ISBN:

9783540266679 [3540266674]    

注記:

Introductory Remarks -- Fundamentals -- Some Fundamentals of Laser Physics -- Principles of Excimer Lasers -- Design and Technology of Excimer Lasers -- High-Repetition-Rate and High-Power Lasers -- High-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings for Excimer Laser Applications -- Small Structures with Large Excimer Lasers -- Historical Review of Excimer Laser Development -- Applications -- Overview -- Ablation -- Micro-Machining -- Via Drilling -- Micro-Processing of Borosilicate Glass and Polymers -- F2-Laser Microfabrication for Photonics and Biophotonics -- Nano-Structuring with Femtosecond Excimer Laser Pulses -- Physical Aspects of Ultra-Fast UV Laser Transfer -- Microlithography -- TFT Annealing -- Fiber Bragg Gratings -- Marking -- Activation and Metallization of Dielectrics -- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films -- Combustion Analysis -- Medical Applications of Excimer La
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

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