Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice. 1st ed. 2005

種類:

電子ブック

責任表示:

Giannuzzi, Lucille A. ; SpringerLink (Online service)

出版情報:

New York, NY : Springer US : Imprint: Springer, 2005

著者名:

• Giannuzzi, Lucille A.
• SpringerLink (Online service)

ISBN:

9780387233130 [038723313X]    

注記:

The Focused Ion Beam Instrument -- Ion - Solid Interactions -- Focused Ion Beam Gases for Deposition and Enhanced Etch -- Three-Dimensional Nanofabrication Using Focused Ion Beams -- Device Edits and Modifications -- The Uses of Dual Beam FIB in Microelectronic Failure Analysis -- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy -- FIB for Materials Science Applications - a Review -- Practical Aspects of FIB Tem Specimen Preparation -- FIB Lift-Out Specimen Preparation Techniques -- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method -- Dual-Beam (FIB-SEM) Systems -- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS) -- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy -- Application of FIB in Combination with Auger Electron Spectroscopy.
The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It has taken its place among the suite of other instruments commonly available in analytical and forensic laboratories, universities, geological, medical and biological research institutions, and manufacturing plants. Although the utility of the FIB is not limited to the preparation of specimens for subsequent analysis by other analytical techniques, it has revolutionized the area of TEM specimen preparation. The FIB has also been used to prepare samples for numerous other analytical techniques, and offers a wide range of other capabilities. While the mainstream of FIB usage remains within the semiconductor industry, FIB usage has expanded to applications in metallurgy, ceramics, composites, polymers, geology, art, bio

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