Fundamentals of microfabrication : the science of miniaturization | 岐阜大学図書館蔵書検索（OPAC）

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Fundamentals of microfabrication : the science of miniaturization. 2nd ed

種類:: 図書
責任表示:: Marc J. Madou
出版情報:: Boca Raton, Fla. : CRC Press, c2002
著者名:: Madou, Marc J. <DA0355770X>
ISBN:: 9780849308260 [0849308267]
注記:: Includes bibliographical references and index

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主題:	Integrated circuits--Design and construction; Lasers--Industrial applications; Machining; Microelectromechanical systems--Design and construction; Microelectronic packaging; Microelectronics
分類・件名:	LCC : TK7836.M33 DDC : 621.3815/2 LCSH : Microelectronics LCSH : Integrated circuits -- Design and construction LCSH : Microelectromechanical systems -- Design and construction LCSH : Machining LCSH : Microelectronic packaging LCSH : Lasers -- Industrial applications
LCCN:	2001043273
TTLL:	eng
言語:	英語
形態:	723 p., [16] p. of plates : ill. (some col.) ; 29 cm
書誌ID:	BA57154278

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