Fundamentals of microfabrication : the science of miniaturization. 2nd ed
- 種類:
- 図書
- 責任表示:
- Marc J. Madou
- 出版情報:
- Boca Raton, Fla. : CRC Press, c2002
- 著者名:
- Madou, Marc J. <DA0355770X>
- ISBN:
- 9780849308260 [0849308267]
- 注記:
- Includes bibliographical references and index
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