Fundamental aspects of silicon oxidation
- 種類:
- 図書
- 責任表示:
- Yves J. Chabal (ed.)
- 出版情報:
- Berlin ; New York : Springer-Verlag, c2001
- 著者名:
- Chabal, Yves J.
- シリーズ名:
- Springer series in materials science ; v. 46 <BA00476831>
- ISBN:
- 9783540416821 [354041682X] (: gw)
- 注記:
- Includes bibliographical references and index
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