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Ionized physical vapor deposition

種類:
図書
責任表示:
edited by Jeffrey A. Hopwood
出版情報:
San Diego : Academic Press, c2000
著者名:
Hopwood, Jeffrey A.  
シリーズ名:
Thin films ; v. 27 <BA25443322>
ISBN:
9780125330275 [0125330278]  CiNii Books  Calil
注記:
Includes index
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