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Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.

種類:
図書
責任表示:
editors, Wei Zhu ... [et al.]
出版情報:
Warrendale, Pa. : Materials Research Society, 1998
著者名:
Zhum, Wei  
シリーズ名:
Materials Research Society symposium proceedings ; v. 509 <BA00013775>
ISBN:
9781558994157 [1558994157]  CiNii Books  Calil
注記:
Includes bibliographical references and index
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