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Tribology issues and opportunities in MEMS : proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, USA, 9-11 November 1997

種類:
図書
責任表示:
edited by Bharat Bhushan
出版情報:
Dordrecht ; Boston : Kluwer Academic, 1998
著者名:
ISBN:
9780792350248 [0792350243]  CiNii Books  Calil
注記:
Includes index
所蔵情報
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