Modeling of film deposition for microelectronic applications
- 種類:
- 図書
- 責任表示:
- edited by Stephen Rossnagel
- 出版情報:
- San Diego ; Tokyo : Academic Press, c1996
- 著者名:
- Rossnagel, Stephen
- シリーズ名:
- Thin films ; v. 22 <BA25443322>
- ISBN:
- 9780125330220 [0125330227]
- 注記:
- Includes bibliographical references and indexes
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