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Modeling of film deposition for microelectronic applications

種類:
図書
責任表示:
edited by Stephen Rossnagel
出版情報:
San Diego ; Tokyo : Academic Press, c1996
著者名:
Rossnagel, Stephen  
シリーズ名:
Thin films ; v. 22 <BA25443322>
ISBN:
9780125330220 [0125330227]  CiNii Books  Calil
注記:
Includes bibliographical references and indexes
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