Hydrogenated amorphous silicon alloy deposition processes

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種類:

図書

責任表示:

Werner Luft, Y. Simon Tsuo

出版情報:

New York : M. Dekker, c1993

著者名:

シリーズ名:

Applied physics ; 1 <BA20820485>

ISBN:

9780824791469 [0824791460]

注記:

Includes bibliographical references (p. 243-316) and index

所蔵情報

子書誌情報

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詳細

主題:	Plasma-enhanced chemical vapor deposition; Silicon alloys; Thin film devices--Design and construction; Thin films--Electric properties; Thin films--Optical properties
分類・件名:	LCC : TK7872.T55 DDC : 621.3815/2 LCSH : Thin film devices -- Design and construction LCSH : Silicon alloys LCSH : Plasma-enhanced chemical vapor deposition LCSH : Thin films -- Optical properties LCSH : Thin films -- Electric properties
LCCN:	93018931
TTLL:	eng
言語:	英語
形態:	xiv, 327 p. : ill. ; 24 cm
書誌ID:	BA20820408

内容紹介

目次情報

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1 図書 Amorphous and microcrystalline silicon solar cells : modeling, materials, and device technology Schropp, Ruud E. I., 1959-, Zeman, Miro, 1957- Kluwer Academic	7 図書 Amorphous silicon technology, 1992 Thompson, M. J. Materials Research Society
2 図書 Hydrogenated amorphous silicon Street, R. A. Cambridge University Press	8 図書 AMORPHOUS SILICON AND RELATED MATERIALS <ED. BY> FRITZSCHE, HELLMUT WORLD SCIENTIFIC
3 図書 Ionized physical vapor deposition Hopwood, Jeffrey A. Academic Press	9 図書 AMORPHOUS SILICON AND RELATED MATERIALS <ED. BY> FRITZSCHE, HELLMUT WORLD SCIENTIFIC
4 図書 PVD for microelectronics : sputter deposition applied to semiconductor manufacturing Powell, Ronald A., Rossnagel, Stephen M. Academic Press	10 図書 Amorphous metallic alloys Luborsky, F. E. Butterworths
5 図書 Electronic transport in hydrogenated amorphous semiconductors Overhof, H. (Harald), 1942-, Thomas, P. (Peter), 1942- Springer-Verlag	11 図書 Synthetic diamond : emerging CVD science and technology Spear, Karl E., Dismukes, John P., Electrochemical Society J. Wiley
6 図書 Technology and applications of amorphous silicon Street, R. A. Springer	12 電子ブック Fatigue of Beta Processed and Beta Heat-treated Titanium Alloys Wanhill, Russell., Barter, Simon., SpringerLink (Online service) Springer Netherlands : Imprint: Springer