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Gettering and deffect engineering in the semiconductor technology : GADEST '89 : proceedings of the 3rd International Autumn Meeting held in Garzau, German Democratic Republic, October 8-13, 1989

種類:
図書
責任表示:
edited by M. Kittler
出版情報:
Vaduz : Sci-Tech Publications, 1989
著者名:
シリーズ名:
Diffusion and defect data : solid state data ; Pt. B . Solid state phenomena ; v. 6 & 7 <BA07841800>
ISBN:
9783908044048 [3908044049]  CiNii Books  Calil
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