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Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

種類:
図書
責任表示:
editors, Theodore M. Besmann, Bernard M. Gallois
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1990
著者名:
シリーズ名:
Materials Research Society symposium proceedings ; v. 168 <BA00013775>
ISBN:
9781558990562 [1558990569]  CiNii Books  Calil
注記:
Includes bibliographical references and indexes
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